SILICON HALIDE REMOVAL
SILANE/SILICON HALIDE SCRUBBER DESIGN
Many processes release exhaust air that contains organohalide combinations of Silicon compounds. This occurs in Fertilizer/Silicone/SemiConductor and various fine chemical manufacturing processes.
Because these components cannot be released to the atmosphere, abatement technology must be incorporated. Scrubbing done correctly is a viable option.
The Silicon compounds when hydrolyzed create a Si-O-Si-O-Si-O polymer commonly called “water glass.” This material can rapidly plug gas inlet nozzles and set up on dry walls causing catastrophic clogging. Scrubber designs must be specialized to take this phenomena into account either by having no dry internal surfaces or using high liquid to gas ratios.
Over the years D. R. TECHNOLOGY has supplied control equipment for the 3 major Silicon Manufactuing Companies in the USA. We have also supplied similar technology for controlling Silicon Tetrafluoride/Hydrogenfluoride/Phosphoric Acid for major Phosphoric Acid manufacturing companies.